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Phone +49 (0)3677/4690 112 - info@nanoanalytik.net

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Description


The nano analytik self-actuated piezoresistive cantilevers technology allows a production of different purpose SPM-sensors with the same type of actuation and deflection-detection scheme.

In this way we are fabricating and delivering, piezoresistive cantilevers for atomic force microscopy, which enables high speed surface topography measurements with an atomic resolution.

 

Cantilever Data

Value

Typical variation

Application

Non contact, contact mode (90° to Surface)


Possible operating mode

Active / passive


   Actuation

Yes, thermally driven actuator


   Readout

Yes, piezoresistive


Material

Si


Dimensions

W = 120 µm

+/- 5 µm


L = 350 µm

+/- 10 µm


T = 3 - 5 µm is possible

+/- 1 µm

Tip hight

In plane

–-

Tip position from top

–-

–-

Force Constant

20 N/m

+/- 10 N/m

Resonance Frequency

f = 30 - 50 kHz is possible

+/- 5 kHz

Possible Coatings

Upon request, reflective backside-coating of proven materials


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