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Description


The “heart” of the measurement system is the functionalized resonator (cantilever-sensor). In principle, this sensor is a mechanical oscillator with a defined resonant frequency. The surface of this sensor is prepared to be attractive to certain kinds of substances. Sticking to the sensor surface, those substances amend the mass and the resonant frequency of the sensor.

The exceptionally low effective mass of those resonators allows them to reach very high mass resolutions of the order of only a few ag (10-18g). By detecting the resonance frequency shift (or phase shift), it is possible to discover ultimately low mass changes. The very accurate measurement of the frequency shift allows calibrating in situ Electron Beam Induced Deposition (Etching) processes, identifying diseases using label-free biomarkers, or recognizing hazards and pollutions.

Principle of operation

System Data

Value

Comment

Vacuum-Suitability

Mesurement-Head is full vacuum compatible

4 throughputs are required for the Controller

Possible cantilever technology

Active / (Active)-on piezo-shaker

dM-Sense,

AFM-Canti

Possible operating mode

Frequenz shift / Phase shift


Controller

Atto, Paan, Zelos, Kronos


Channels

Min. 1

Optimal 2

Resolution

16 Bit


Bandwith

10 MHz


Scanner

NONE


Resolution

NONE


Open Loop

NONE


Related Publications

Request

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Acknowledgements


The presented system was successfully demonstrated within the IAQSense research project, funded by the European Community’s 7th Framework Program NMP.2013.1.2-1 under grant agreement 604325.