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Phone +49 (0)3677/4690 112 - info@nanoanalytik.net

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Description


nano analytik developed a novel resonator-based mass sensor for use in EBID or IBID.  Resonators are used as inertial balances to detect small quantities of adsorbed or removed mass through shifts in oscillation frequency. The mass sensor is capable to detect the gas-molecule surface-coverage, the gas-residence time, the coverage density on particular surface, and growth or removal speed during the EBID or IBID process. The electronics is capable for in situ frequency shift tracking through deposition and etching events with a sensitivity of Attogram (weighing at the Attogram  scale).




Messbereich: Femto- bis Zeptogramm (10-18 kg bis 10-24kg)

Messsensitivität: ca. s=10 ag/Hz

Cantilever Data

Value

Typical variation

Application

Non contact/ tapping mode, contact mode


Possible operating mode

(Active)-on piezo-shaker / passive


   Actuation

Extern, already bonded on piezo-shaker is possible


   Readout

Yes piezoresistive


Material

Si


Dimensions

W = 10 µm (2,5 µm of one leg)

+/- 2 µm (+/- 0,5 µm)


L = 20 - 50 µm is possible

+/- 5 µm


T = 1 - 3 µm is possible

+/- 1 µm

Tip hight

–-

–-

Tip position from top

–-

–-

Force Constant



Resonance Frequency

f = 1 - 3 MHz

+/- 500 kHz

Possible Coatings

Upon request, reflective backside-coating of proven materials


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