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Publications

Advanced electric-field scanning probe lithography on molecular resist using active cantilever

J. Micro/Nanolith. MEMS MOEMS, 14(3), 031202 (2015). doi:10.1117/1.JMM.14.3.031202

Marcus Kaestner; Cemal Aydogan; Hubert-Seweryn Lipowicz; Tzvetan Ivanov; Steve Lenk; Ahmad Ahmad; Tihomir Angelov; Alexander Reum; Valentyn Ishchuk; Ivaylo Atanasov; Yana Krivoshapkina; Manuel Hofer; Mathias Holz; Ivo W.Rangelow

DOI: 10.1117/1.JMM.14.3.031202

DOI: 10.1117/12.2085760

Self-actuated, self-sensing cantilever for fast CD measurement

Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX, 94240P. doi: 10.1117/12.2085760 (March 19, 2015)

Ahmad Ahmad; Tzvetan Ivanov; Alexander Reum; Elshad Guliyev; Tihomir Angelov; Andreas Schuh; Marcus Kaestner; Ivaylo Atanasov; Manuel Hofer; Mathias Holz; Ivo W. Rangelow,

http://febip2014.physik.uni-frankfurt.de

FEBIP 2014 - Goethe Universität Frankfurt am Main

The 5th workshop on Focused Electron Beam Induced Processing FEBIP2014 to be held in Frankfurt am Main, Germany, from July 22nd to 24th 2014.


nano analytik GmbH presented in cooperation with TU Ilmenau on the 5. FEBIP workshop, at the Goethe Universität Frankfurt, new results in the field of „Sensor for In-Situ Monitoring of Focused Electron- and Ion-Beam Induced Processes“.

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Fast SPM Scanning Stage

ACTUATOR 2014, 14th International Conference on New Actuators, Bremen, Germany, 23-25 June 2014, S. 589-592

E. Guliyev, A. Ahmad, M. Kästner, T. Angelov, S. Lenk, I. Atanasov, N. Nikolov, T. Ivanov, K. Szostak, M. Holz, A. Reum, M. Hofer, K. Nieradka, T. Hrasok, H. Lipowicz, B. Volland, V. Ishchuk, J.-P. Zöllner and I.W. Rangelow

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ACTUATOR 2014 Conference page

Scanning probes in nanostructure fabrication

Journal of Vacuum Science & Technology B 32, 06F101 (2014);

doi: 10.1116/1.4897500

Marcus Kaestner, Tzvetan Ivanov, Andreas Schuh, Ahmad Ahmad, Tihomir Angelov, Yana Krivoshapkina, Matthias Budden, Manuel Hofer, Steve Lenk, Jens-Peter Zoellner, Ivo W. Rangelow, Alexander Reum, Elshad Guliyev, Mathias Holz, and Nikolay Nikolov

Journal of Vacuum Science & Technology B

http://www.oxford-instruments.com

Euro AFM Forum - Oxford Instruments

Asylum Research Announces the 4th Euro AFM Forum at Georg-August Universität Göttingen, March 17-19, 2014


nano analytik GmbH presented in cooperation with TU Ilmenau on the 4. Euro AFM Forum, at the Georg-August Universität Göttingen, new results in the field of „High frequency and low stiffness cantilever for high speed AFM applications“.

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Six-axis AFM in SEM with self-sensing and self-transduced cantilever for high speed analysis and nanolithography

Journal of Vakuum Science & Technology B34, 06KB01 (2016);

doi: 10.1116/1.4964290 (October 04, 2016)

T. Angelov, A. Ahmad, E. Guliyev, A. Reum, I. Atanasov, Tzv. Ivanov, V. Ishchuk, M. Kästner, Y. Krivoshapkina, St. Lenk, C. Lenk, I.W. Rangelow, M. Holz and N. Nikolov


DOI: 10.1116/1.4964290

DOI: 10.1116/1.4966556

Pattern-generation and pattern-transfer for single-digit

nano devices

Journal of Vacuum Science and Technology and Microelectronics 34 (6)

doi: 10.1116/1.4966556 (November 03, 2016)

I. W. Rangelow, A. Ahmad1, T. Ivanov, M. Kaestner, Y. Krivoshapkina, T. Angelov, S. Lenk, C. Lenk, V. Ishchuk, M. Hofmann, D. Nechepurenko, I. Atanasov, B. Volland, E. Guliyev, Z. Durrani, M. Jones, C. Wang, D. Liu, A. Reum, M. Holz, N. Nikolov, W. Majstrzyk, T. Gotszalk, D. Staaks, S. Dallorto and D. L. Olynick

DOI: 10.1116/1.4967159

Large area fast-AFM scanning with active "Quattro" cantilever arrays

Journal of Vacuum Science & Technology B34, 06KM03 (2016);

doi: 10.1116/1.4967159 (November 09, 2016)

A.Ahmad. N. Nikolov, T. Angelov, Tzv. Ivanov, A. Reum, I. Atanasov, E. Guliyev, V. Ishchuk, M. Kästner, St. Lenk, C. Lenk, I.W. Rangelow and M. Holz