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Description


The AFM in SEM from the nano analytik GmbH is not only used for imaging, it is capable to be employed for metrology as well.

For this purpose, we are offering a compact-AFM system, applicable in any SEM without chamber modification, for micro manipulation and metrology scanning.

The XYZ6X-Stage is a non-magnetic, closed-loop XYZ nanopositioner with a 60μm x 60μm x 20μm range (Position Noise (nm): x,y = 0.4; z = 0.2) of motion and an extremely low out-of-plane motion. It has the high resonant frequency (x,y = 750Hz; z = 2000Hz) and is designed for space-constrained applications that require high-precision positioning. Furthermore, the actuators are offering manipulation capabilities in the range of 1,5 cm in X, Y and Z with a precision of 3 nm.

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AFM operating under

room and vacuum conditions

Room conditions

Vacuum conditions

No machine downtime of the AFM or your SEM tool, due to AFM operation capability in vacuum
and air



Fast installation in less than 5 min

In general, nano analytik cantilevers used in SEM meet the following criteria:

20mm x 20mm AFM-tip addressing field

60µm x 60µm AFM bottom scanning field


The patented two scanner concept

System Data

Value

Vacuum-Suitability

Mesurement-Head is full vacuum compatible

Maximum XY-range (resolution)

60 µm (0,4 nm)

Maximum Z-range (resolution)

20 µm (0,2 nm)

Maximum XY adressing field


Static / Dynamic RMS Z-noise


Maximum sample size / height

ø 70 mm / 6 mm

Navigation camera

Optional available for air operation

Approach

8 mm full automatic or step-by-step approach

Imaging modes

DC, AC, Phase Contrast, Fwd & Bwd, Force gradient modulation freqency phase modulation

Spectroscopy modes

Force-Distance, Amplitude-Distance

Advanced modes

Current-Distance, Lithography, Q-Control, MFM, EFM

Size (LWH) / Weight

 108x70x50 mm / 360 g

Mounting

Flexible for most of the existing SEM tools

Specifications

Videos

Publications

Poster zeigen?

Applications

SII Single Ion Implanter Enabling pioneering research SEM + FIB + AFM Lithography