Active-probe AFM across applications
Nanoscale insight across research and industry.
Explore how active-cantilever AFM supports a wide range of research, metrology and industrial applications—from nanoscale characterization to integrated measurement solutions.
Nanoscale metrology for semiconductor surfaces.
High-resolution AFM provides quantitative surface metrology for semiconductor processes, including evaluation of CMP results such as dishing, topography and local height variations.
Explore applicationAFM integrated directly into your equipment.
Active cantilevers enable a compact AFM architecture for integration into customer equipment, automated measurement systems and industrial workflows.
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Detect nanoscale changes in mass.
Active cantilevers enable sensitive measurement of changes in cantilever resonance associated with nanoscale mass loading and surface processes.
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Write, inspect and navigate at the nanoscale.
Combine nanoscale patterning, AFM inspection and precise probe navigation within the same scanning probe platform.
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