Applications

Active-probe AFM across applications

Lithography Semiconductor Metrology Industrial Integration Mass detection

Nanoscale insight across research and industry.

Explore how active-cantilever AFM supports a wide range of research, metrology and industrial applications—from nanoscale characterization to integrated measurement solutions.

01
Semiconductor metrology

Nanoscale metrology for semiconductor surfaces.

High-resolution AFM provides quantitative surface metrology for semiconductor processes, including evaluation of CMP results such as dishing, topography and local height variations.

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02
Industrial Integration

AFM integrated directly into your equipment.

Active cantilevers enable a compact AFM architecture for integration into customer equipment, automated measurement systems and industrial workflows.

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03
Mass Detection

Detect nanoscale changes in mass.

Active cantilevers enable sensitive measurement of changes in cantilever resonance associated with nanoscale mass loading and surface processes.

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04
Scanning Probe Lithography

Write, inspect and navigate at the nanoscale.

Combine nanoscale patterning, AFM inspection and precise probe navigation within the same scanning probe platform.

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Scanning Probe Lithography