The 5th workshop on Focused Electron Beam Induced Processing FEBIP2014 to be held in Frankfurt am Main, Germany, from July 22nd to 24th 2014. FEBIP 2014 – Goethe Universität Frankfurt am Main. In cooperation with TU Ilmenau, nano analytik GmbH presented new results in the field of “Sensor for In-Situ Monitoring of Focused Electron- and Ion-Beam Induced Processes“ at the 5th FEBIP workshop at the Goethe Universität Frankfurt.