The project meeting for “Ultra-Fast Correlative Metrology PSIAFM”

The project meeting for “Ultra-Fast Correlative Metrology: PSIAFM” took place at Technische Universität Ilmenau from June 8 to 10, 2026. This EU-EUREKA project is developing an ultra-fast, high-precision platform for metrology and defect analysis in 3D chip manufacturing by combining optical interferometric measurements with Atomic Force Microscopy (AFM).