The AFMinSEM from nano analytik GmbH integrates atomic force microscopy directly inside a scanning electron microscope, enabling correlative microscopy, correlative nanofabrication, and in-situ 3D analysis at the nanoscale. It allows simultaneous AFM and SEM imaging on the same sample area, bridging two powerful characterisation techniques into a single workflow.

The compact AFM module can be installed into virtually any SEM chamber without permanent chamber modification. Designed for rapid deployment and space-constrained environments, the system supports both high-precision metrology scanning and micromanipulation applications. The installation is completed in less than 5 minutes.

The same AFM head can also be used in ambient conditions. The exchange time of the cantilever is about 5 s. AFM tilt angles from -10° to 60° provide direct SEM visibility of the tip during AFM operation. Combined with SEM stage’s 5 degrees of freedom and the AFM’s 6 degrees, the system offers 11 degrees of freedom in total. The extremely compact AFM design does not compromise the functionalities of SEM, allowing proper operations of both secondary and backscattered electron detectors at optimal working distance.