Correlative AFM and SEM Imaging in a Single Platform
The AFMinSEM from nano analytik GmbH integrates atomic force microscopy directly inside a scanning electron microscope, enabling correlative microscopy, correlative nanofabrication, and in-situ 3D analysis at the nanoscale. It allows simultaneous AFM and SEM imaging on the same sample area, bridging two powerful characterisation techniques into a single workflow.
The compact AFM module can be installed into virtually any SEM chamber without permanent chamber modification. Designed for rapid deployment and space-constrained environments, the system supports both high-precision metrology scanning and micromanipulation applications. The installation is completed in less than 5 minutes.
The system features a non-magnetic closed-loop nanopositioning stage with a 60µm x 60µm x 20µm range (Position Noise: X, Y=0.4nm; Z=0.2nm) of motion and an extremely low out-of-plane motion. It features high resonant frequencies (X, Y=750Hz; Z=2000Hz) and is designed for space-constrained applications that require high-precision positioning. Furthermore, the coarse positioning stage offers manipulation capabilities in the range of 1,5 cm in X, Y and Z with a precision of 3nm. A fully automatic or manual step-by-step approach mechanism provides up to 8 mm approach distance for safe and reproducible operation. An optional navigation camera is available for air operation.
The system supports Non-contact, Contact, and Phase Shift imaging modes, as well as Force–Distance and Amplitude–Distance spectroscopy modes. Additional operational modes including Current–Distance measurements, Lithography, Q-Control, Magnetic Force Microscopy (MFM), Electrostatic Force Microscopy (EFM), and Kelvin Probe Force Microscopy (KPFM) are optionally available.
