The Navora AFM is a unique, optical beam deflection (OBD)-free atomic force microscope designed for ease of use and exceptional versatility. It provides high-resolution imaging and fast scanning for a wide range of applications, including surface roughness analysis, critical dimension (CD) measurements, and electrical and mechanical characterization—without compromising imaging performance or speed.

The instrument employs active cantilever with sharp microfabricated probe tips, with each tip individually qualified to ensure outstanding imaging performance. Topographic images are generated by measuring the cantilever deflection with ultra-sensitive piezoresistive readout of the active cantilever, which results from atomic-scale interaction forces between the probe tip and the sample surface. This simplifies system integration and provides greater flexibility when designing mechanical and acoustic isolation for different operating environments. As the tip scans in close proximity to the sample, these interactions enable high-resolution surface imaging and precise nanometrology. Furthermore, the active cantilever technology is fully compatible with measurements in air, liquids, and vacuum.

The Navora AFM is an ideal solution for industrial metrology and academic research. Combining active cantilever technology, high-speed operation, outstanding measurement accuracy, and exceptional ease of use, it delivers reliable, high-quality nanoscale characterization across a broad range of applications.