Research & Applications

Our Projects

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EFRE 21-27 Project – Parallel Cantilever-AFM
Development of a Parallel Cantilever AFM for Ultrafast Structural Testing

EFRE 21-27 Project – Parallel Cantilever-AFM

Thüringer Aufbaubank
Scanning Probe Nano Fabrication Machine

SPNF

Thüringer Aufbaubank
Traceability of localised functional properties of nanostructures with high speed scanning probe microscopy

MetExSPM

EMPIR
Key Technologies for Quantum Sensors.

DiaQuantFab

Bundesministerium für Bildung und Forschung - BMBF
Multifunctional ultrafast microprobes for on‐the‐machine measurements.

EMPIR 17IND05 MicroProbes

Traceable micro-measurements of surface form and property are essential in high precision manufacturing industries where the precision control of tools and components and the quality…
Development of a compact AFM unit for industrial applications.

INRAM – Industrial AFM

Thüringer Aufbaubank
Novel sensor concepts for air quality measurement.

IAQSense
Development of active RDD cantilevers with functionalized nano-tip.

IRLS – Functionalized-Tip
EU-EUREKA

Ultra-Fast Correlative Metrology:  Integrating Phase Shift Interferometry with Scanning Probe Microscopy (PSISPM)

The EU-EUREKA project is developing an ultra-fast, high-precision platform for metrology and defect analysis in 3D chip manufacturing by combining optical interferometric measurements with Atomic…