Gallery
Nanoscale precision — in pictures
Images and videos from our instruments, applications, and nanoscale results achieved with nano analytik systems worldwide.
AFMinSEM
Correlative image_ AFM_SEM_EDAX
Sample: 22.2 nm thick SiO 2 features etched with ZEP520 resist. Upper line of SEM and X-ray images provide information on the chemical composition of the sample (carbon and oxygen elemental maps). Bottom line shows images of 2D-AFM, 3D-AFM, and Phase-AFM of the same features.
AFMinSEM
AFMinSEM by nano analytik GmbH allows metrology under vacuum conditions, together with SEM, hence enabling correlative measurement of those two technologies.
AFMinSEM measurement example
With our AFMinSEM system, measurement in contact and non-contact mode is possible. This image was obtained in non-contact mode on MoS2 sample.
AFMinSEM measurement example
Image obtained with contact mode
AFMinSEM_Video_Part I
AFMinSEM system with active cantilever from nano analytik GmbH.
AFMinSEM_Video_Part II
Click on the card to watch part II of AFMinSEM showing installation in 5 minutes
AFMinSEM_Video_Part III
MEMS characterization and nanomanipulation
Material Science
SrTiO3
Measurment of SrTiO3
STEPP sample
The Silicon Test Echeloned Pattern (STEPP) with a single monoatomic step height 0,314 nm.
HOPG
Celgard
Measurement of Celgard ® oriented Polypropylene membrane exhibiting precise AFM force control.
SPL
FE-SPL
(Left) AFM image of “latent” features after exposure in a resist with the AFMinSEM and (right) after development in xylene. The work-piece was inspected and measured by switching the AFMinSEM from FE-SPL to AFM non- contact imaging mode.
HR SPL